Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 40 Issue 1-a
3
INSTALLATION
Remote Mode
COM1
Remote Mode
I/O Remote
Remote Mode
STP-Link
Levitation
Remote Mode
COM2
NORM:******rpm
……
Speed Set Point
xxxx rpm
Speed Set Point
xxxx rpm
TMS Function
DISABLE
TMS Function
ENABLE
A
B
C
D
E
H
Second Damage Limi
t
DISABLE
Second Damage Limi
t
ENABLE
I
2nd Speed Option
ENABLE - Parallel
2nd Speed Option
DISABLE
2nd Speed Option
ENABLE - Serial
G
F
Inhibit Command
DISABLE
Inhibit Command
ENABLE
UP
DOWN
ENTER
SELECT
SELECT UP
+
2nd Speed Set Point
xxxx rpm
2nd Speed Set Point
xxxx rpm
J
Leak Valve Option
DISABLE
Leak Valve Option
ENABLE
Figure 25 - Parameter setting method
A. Operation mode F. Second speed function setting
B. Select remote mode G. Second speed setting
C. Rated speed setting H. Emergency vent valve setting
D. TMS function setting I. Second Damage Limit setting
E. INHIBIT function setting J. To Warning function setting