Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 i Issue 1-a
PAGE
i
CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 2
1.3.1 Warranty period 2
1.3.2 Item warranted 2
1.3.3 Disclaimer 2
1.3.4 Spare parts 3
1.4 Labels 3
1.5 Label affixing positions 5
1.6 General description 6
1.6.1 Cable sets 7
2 TECHNICAL DATA 9
2.1 SCU-1600 specifications 9
3 INSTALLATION 13
3.1 Unpacking 13
3.2 Front panel 13
3.3 Rear panel 16
3.4 Precautions before installation 17
3.4.1 Operating environment 17
3.4.2 Insulation test 17
3.4.3 Installation area 18
3.5 Attaching the SCU-1600 to a rack 19
3.6 Cable connection 20
3.6.1 STP connection cable 21
3.6.2 TMS connection cable 22
3.6.3 Power cable 24
3.7 Connecting to semiconductor equipment 27
3.7.1 Connecting to power 27
3.7.2 Emergency off circuit (EMO circuit) 27
3.8 Remote communication 28
3.8.1 Parallel communication 28
3.8.2 Serial communication 28
3.9 Adjustment methods 29
3.9.1 Tuning 29
3.9.2 Tuning method 29
3.9.3 Change of data after tuning 32
3.10 Confirmation mode 33
3.10.1 Confirmation method 33
3.11 Parameter set mode 35
3.11.1 Remote operation setting 35
3.11.2 Rotational speed setting 35
3.11.3 TMS setting 35
3.11.4 Rotational inhibit signal setting 35