Edwards SCU-1600

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Table of Contents

Default Chapter5
- Table of Contents5
1 Introduction13
- Scope and Definitions13
- Applied Standards14
- Limited Warranty14
- Labels15
- Label Affixing Positions17
- General Description18
2 Technical Data21
- SCU-1600 Specifications21
9 SCU-1600 Dimensions (MM)25
3 Installation25
- Unpacking25
- Front Panel25
- Rear Panel28
  - SCU-1600 Rear Panel28
  - SCU-1600 Rear Panel Connection28
- Precautions before Installation29
- Attaching the SCU-1600 to a Rack31
- Cable Connection32
12 Installing the SCU-160033
- Connecting to Semiconductor Equipment39
  - Connecting to Power39
  - Emergency off Circuit (EMO Circuit)39
13 Example of Securing the SCU-160033
- STP Connection Cable33
- STP Pump Connection Cable33
- TMS Connection Cable34
19 Power Cable (with Plug)40
- Remote Communication40
- Adjustment Methods41
- Confirmation Mode45
  - Confirmation Method45
- Parameter Set Mode47
20 Connecting Method of the Power Cable Without Plug40
21 REMOTE X7 Connector40
23 Tuning Procedures52
27 Parameter Setting Method (Continued)56
- Manual Operation Mode57
  - Manual Operation Method57
4 Operation59
- Before Starting the STP Pump59
  - Confirmation before Starting59
  - Confirmation of Vacuum System59
- Powering on60
  - Self Test60
  - CAUTION" Message in the Self Test State60
- How to Start/Stop the STP Pump61
- Manual Start/Stop the STP Pump61
- Remote Operation63
30 Operational Procedures66
- Powering off75
  - Reset Operation During Remote Operation (REMOTE X7)75
- Operating the TMS Unit (for Use with the TMS Unit)76
5 Serial Communication Protocol77
- Introduction77
- Connection and Setting up77
17 X3A/X3B Pin Position78
- Protocol Specifications81
- Command Specifications91
28 Warning Value Bit Assign110
- Second Speed Option Setting110
  - Option Function Number and Parameter List110
- Second Speed Selection111
  - Readoptions112
- Second Speed Function Setting112
  - Option Function Number and Parameter List112
- Second Speed Select113
6 Stp-Link115
31 Functions of STP-Link117
7 Maintenance117
- Safety Functions117
- WARNING" Message Function121
  - WARNING" Message Display Function121
- WARNING" Message Description122
34 Accumulated Damage Point and Warning Message125
- WARNING" Function Setting125
  - Default Setting of "WARNING" Function125
  - Factory Setting and Variable Range125
- Error at Self Test State126
42 Error Messages after Self Test (Continued)136
- When Error Message Is Not Displayed on LCD136
  - Abnormalities When Powering on136
  - Abnormalities When Performing Rotational Operation136
- Error Record" Message Display Function137
  - Troubleshooting While the STP Pump Is Rotating137
- Maintenance and Inspection138
  - Cleaning138
  - Overhaul138
43 Error Messages after Self Test (Continued)136
44 Error Messages after Self Test (Continued)136
8 Storage, Transportation and Disposal139
- Storage of the SCU-1600139
- Transporting for Repair or Overhaul139
- Disposal140

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