Edwards SCU-1600 - Page 6

SCU-1600 Control Unit for Turbomolecular Pump
March 10 ii Issue 1-a
PAGE
ii
CONTENTS (CONTINUED)
Section Title Page
3.11.5 Second speed option setting 35
3.11.6 Second speed setting 35
3.11.7 Optional output signal setting (Emergency vent valve setting) 36
3.11.8 Second Damage Limit setting 36
3.11.9 Warning function setting 37
3.11.10 Serial port COM1 setting 38
3.11.11 Serial port COM2 setting 38
3.11.12 Date/Time setting 38
3.11.13 Factory setting 38
3.11.14 Parameter setting procedure 39
3.12 Manual operation mode 45
4 OPERATION 47
4.1 Before starting the STP pump 47
4.1.1 Confirmation before starting 47
4.1.2 Confirmation of vacuum system 47
4.2 Powering ON 48
4.2.1 Self test 48
4.2.2 "CAUTION" message in the self test state 48
4.3 How to start/stop the STP pump 49
4.4 Manual start/stop the STP pump 49
4.4.1 Starting the STP pump 49
4.4.2 Stopping the STP pump 49
4.4.3 Starting the STP pump after stopping 49
4.5 Remote operation 51
4.5.1 Input signal pins 51
4.5.2 Output signal pins 55
4.5.3 Remote setting 59
4.5.4 Starting/Stopping the STP pump 59
4.5.5 Rotation INHIBIT signal 60
4.5.6 Second speed option 61
4.5.7 Starting the STP pump after stopping 63
4.5.8 Starting the STP pump after a safety function operates 63
4.6 Powering OFF 63
4.7 Operating the TMS unit (for use with the TMS unit) 64
4.7.1 Before starting 64
4.7.2 Starting/Stopping 64
4.7.3 Setting the TMS unit function 64
4.7.4 Temperature control 64