SCU-1600 Control Unit for Turbomolecular Pump 
March 10  iii  Issue 1-a 
PAGE
iii
CONTENTS (CONTINUED) 
Section Title  Page 
5  SERIAL COMMUNICATION PROTOCOL  65 
5.1 Introduction  65 
5.2  Connection and setting up  65 
5.2.1 Signal connection  65 
5.2.2  Connecting the RS485  68 
5.2.3  Communication parameter setting  69 
5.3 Protocol specifications  69 
5.3.1 General description  69 
5.3.2  Standard transmission frame  
(in the RS232/RS485 single point connection)  70 
5.3.3  Control command  
(in the RS232/RS485 single point connection)  71 
5.3.4  Query command  
(in the RS232/RS485 single point connection)  72 
5.3.5  Transmission data format  73 
5.3.6  Frame control (checksum)  74 
5.3.7 Error control  74 
5.3.8  Transmission frame in the RS485 multi-point connection  74 
5.3.9  Control command in the RS485 multi-point connection  76 
5.3.10  Query command in the RS485 multi-point connection  77 
5.3.11  Broadcasting command in the RS485 multi-point connection  78 
5.4 Command specifications  79 
5.4.1 Command list  79 
5.4.2 ReadMeas  80 
5.4.3 Command  80 
5.4.4 ReadFailMess  81 
5.4.5 ReadModFonct  84 
5.4.6 ReadVersion  86 
5.4.7 ReadCounters  87 
5.4.8 ReadSetPoint  88 
5.4.9 ReadMotorTemp  88 
5.4.10 ReadStatus  89 
5.4.11 ReadEvents  90 
5.4.12 SetSpeedSetPoint  91 
5.4.13 ReadSpeedSetPoint  92 
5.4.14 ReadModFonctWithWarning  93 
5.4.15 ReadMeasValue  96 
5.4.16 SetOptions  98 
5.4.16.1  Second speed option setting  98 
5.4.16.2  Second speed selection  99 
5.4.17 ReadOptions  100 
5.4.17.1  Second speed function setting  100 
5.4.17.2  Second speed select  101