Edwards SCU-1600 - Page 8

SCU-1600 Control Unit for Turbomolecular Pump
March 10 iv Issue 1-a
PAGE
iv
CONTENTS (CONTINUED)
Section Title Page
6 STP-LINK 103
7 MAINTENANCE 105
7.1 Safety functions 105
7.1.1 Power failure 105
7.1.2 Operation after a power recovery 106
7.1.3 Abnormal state of magnetic bearing 107
7.1.4 Excessive vibration 107
7.1.5 Motor driver overload 107
7.1.6 Overheating inside the STP pump 107
7.1.7 Overheating inside the SCU-1600 107
7.1.8 Overspeed 108
7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 108
7.2 "WARNING" message function 109
7.2.1 "WARNING" message display function 109
7.3 "WARNING" message description 110
7.3.1 Damage point function 110
7.3.2 First damage limit 110
7.3.3 Second damage limit 110
7.3.4 Imbalance X_H, X_B, Z 111
7.3.5 Pump run time over 111
7.3.6 Pump overload 111
7.3.7 Low RTC battery 112
7.4 "WARNING" function setting 113
7.5 Error at self test state 114
7.5.1 Error after self test 115
7.5.2 Error messages 115
7.5.3 Troubleshooting immediately after power failure occurs 115
7.5.4 Troubleshooting immediately
after other abnormality/errors occur 116
7.6 When error message is not displayed on LCD 124
7.6.1 Abnormalities when powering ON 124
7.6.2 Abnormalities when performing rotational operation 124
7.6.3 Other abnormalities 125
7.7 "Error Record" message display function 125
7.8 Maintenance and inspection 126
7.8.1 Cleaning 126
7.8.2 Overhaul 126
8 STORAGE, TRANSPORTATION AND DISPOSAL 127
8.1 Storage of the SCU-1600 127
8.2 Transporting for repair or overhaul 127
8.3 Disposal 128