SCU-1600 Control Unit for Turbomolecular Pump
March 10 10 Issue 1-a
2
TECHNICAL DATA
TMS control unit Built in
Battery for clock function Specification Lithium battery (3 V, 130 mAhr)
Model DS9034PCX
Maker MAXIM
Serial communication function RS232/RS485
Operation switch START (Push-button switch•Green)
STOP (Push-button switch•Dark Grey)
RESET (Push-button switch•Grey)
SELECT (Push-button switch•Grey)
UP (Push-button switch•Grey)
DOWN (Push-button switch•Grey)
ENTER (Push-button switch•Grey)
MANUAL/REMOTE changeover (Slide switch•White)
Panel indication LED ACCEL. (Green LED)
NORMAL (Green LED)
BRAKE (Green LED)
TEMP CTRL (Green LED)
POWER (Green LED)
FAILURE (Red LED)
REMOTE (Green LED)
Panel display LCD (2 lines of 20 characters)
Input/Output terminal AC POWER X2 (3 pins)
P.CONNECTOR X1 (60 pins)
MOTOR X4 (8 pins)
TMS X5 (26 pins)
REMOTE X7 (37 pins)
COM X3A/X3B (9 pins × 2)
STP-LINK X8 (8 pins)
Safety function Electromagnetic bearing failure detection
STP pump overheat detection
Motor driver overload detection
Power failure detection
STP pump overspeed detection
STP control unit overheat detection
TMS unit failure detection
Other failure detection