Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 34 Issue 1-a
3
INSTALLATION
Warning Pump Overload
DISABLE
Driver Version PM xxxxxx
Pump Type STP xxxxxx Ctrl Serial Number xxxxx
Damage Limit Co un ter xxxxx
TMS Set Point xxx °C
Speed Set Point xxxx rpm
2nd Speed Set Point xxxx rpm
Inhibit Function DISABLE
Remote mode I/O Remote
TMS Function DISABLE
2nd Speed Option DISABLE
Error Record n 2/n failu re message
Error Record n 1/n failure message
Error Record n n/n failure message
A B C D
NORM : ******rpm
Pump Hour Counter xxxxx H
Start Counter xxxxx
Ctrl Hour Counter xxxxx H MOTOR TEMP xxx °C
UP
DOWN
SELECT
Pump Serial Number xxxxx Software Version Ver 76 xxxxxx
E
F
Date Time 2009/AUG/xxxxxx
Warning Pump Runtime
DISABLE
Warning Imbalance ENABLE
Warning Damage point ENABLE
Digital AMB Version AM 76 xxxxxx AMB Parameter Ver xxxxxx
LEAK VALVE Option DISABLE
MOTOR CURR ENT xxx %
A. Operation mode B. Version information C. Individual information D. Current settings E. Current function settings F. Error record
Figure 24 - Confirmation mode