Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 50 Issue 1-a
4
OPERATION
Software Version
76
A
*.*
Levitation
TMS TEMP : **°C
Autotest complete
ACCEL : ***00rpm
TMS TEMP :**
°
C
NORM : ***00rpm
TMS TEMP :**
°
C
BRAKE : ***00rpm
TMS TEMP :**
°
C
I
H
G
F
B
E
Auto test
2009
/
MAY/20 15:40
C
A
K
J
Auto tes
t
STP-A2503
/
A3003
D
Figure 30 - Operational procedures
A. MAIN POWER "ON"
B. Version
E. Self test completed
(upper only)
H. Normal Operation State
Upper: Normal operation state
Lower: TMS actual temp
(for only with TMS unit)
C. Self test
Upper: Autotest
Lower: Date
F. Levitation State
Upper: Levitation state
Lower: TMS actual temp
(for only with TMS unit)
I. Break State
Upper: Brake state
Lower: TMS actual temp
(for only with TMS unit)
J. Start operation of the STP pumpD. Self test
Upper: Autotest
Lower: Model of
connected pump
G. Acceleration State
Upper: Acceleration state
Lowe: TMS actual temp
(for only with TMS unit)
K. Stop operation of the STP pump