Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 85 Issue 1-a
5
SERIAL COMMUNICATION PROTOCOL
Pump operation mode Value
Levitation 1
No Levitation 2
Acceleration 3
Normal 4
Deceleration (Brake) 5
Autotest 6
Tuning 7
Tuning Complete 8
[System Reservation] 9, 10, 11
Table 26 - Pump operation mode
Example:
Pump operation mode : 01
hex
= 1 = Levitation
The number of error : 02
hex
= 2 errors
Error 1 : 0D
hex
= 13 = Disturbance Xh
Error 2 : 0F
hex
= 15 = Disturbance Xb
Error 3 to 32 : 00
hex
= No error detected
Parameter 1 2 3 4 5 6 7 8 9 10 11
ASCII 0 1 0 2 0 D 0 F 0 0 0 0 0 0 0 0 0 0 0 0 0 0
HEX 30 31 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30 30 30 30 30
Parameter 12 13 28 29 30 31 32 33 34
ASCII 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0
HEX 30 30 30 30
[Omitted]
30 30 30 30 30 30 30 30 30 30 30 30 30 30