PREFACE
PREFACE-1
PREFACE
Thank you very much for purchasing the SU8700 scanning electron microscope.
The SU8700 scanning electron microscope (hereafter abbreviated as SU8700) is designed for
observing/evaluating specimens prepared for the system by means of an electron beam
accelerated at 100 V to 30 kV.
In this manual, the functions and maintenance of this product are explained for the person
who has received training of electron microscope operations. Supervision is required when a
person who has not received such technical training.
Before attempting operation, be sure to read this manual carefully together with the
instruction manuals accompanying the accessories you purchased. Please acquaint yourself
with the SU8700 and its accessories of proper use.
After reading this instruction manual, keep it in a safe place near the instruction so that it can
be referred to whenever needed.
ABOUT THIS MANUAL
● The SU8700 comprises of a main unit and optional accessories.
This instruction manual includes descriptions of the outline, functions, operations and
maintenance procedures of the SU8700 main unit.
For each optional accessory of the SU8700, refer to the relevant accompanying instruction
manual.
● This instruction manual consists of the following six chapters.
Chapter 1 SPECIFICATION AND INSTALLATION REQUIREMENTS (installation
requirements, items to be prepared by user, etc.)
Chapter 2 FUNCTION (including descriptions of control knobs and switches)
Chapter 3 OPERATION (including operational procedures for image observation,
and image data saving/output)
Chapter 4 MAINTENANCE (including maintenance procedures for each part,
troubleshooting, and action to take on occurrence of power failure, etc.)
Chapter 5 REPLACEMENT PARTS
Chapter 6 TROUBLESHOOTING
● This manual contains the operating and maintenance instructions and cautionary matters
for the SU8700.
● First of all, be sure to read the “IMPORTANT” and “GENERAL SAFETY GUIDELINE”
chapters at the beginning of this manual for ensuring safety in operation of the SU8700.