Hitachi SU8700 - Operation after Recovery from Power Failure and for Star-Up of Instrument; Operation at Water Failure; Operation for Water Recovery

4.5 Operation after recovery from power failure and for star-up of instrument
4-8
4.5 Operation after recovery from power failure and for
star-up of instrument
(1) If the detectors of the third party vendor products are installed to the SEM, turn on the
power of the third party vendor products.
(2) Power ON the power breaker on the facility switchboard.
(3) Power ON the MAIN breaker on the EO Control unit switchboard.
(4) Press and hold the [RESET] switch for more than one second. A clicking noise of the relay
will be heard from inside.
(5) Power ON the HV, IP/HV, EVAC and EOC breakers on the EOC Control unit switchboard.
(6) Power ON the IP1, IP2 and STAGE breakers at rear side of the instrument.
(7) Turn ON the [EVAC POWER] switch at front of the instrument. Confirm that the EVAC
lamp on the display panel is ON.
(8) Turn ON the [EOC POWER] switch at front of the instrument. Confirm that the EOC lamp
on the display panel is ON.
(9) Power ON the PC and start up the SEM application. Log in with the administer user:
SU8700.
(10) Perform the electron gun baking.
Reference: 4.8 Procedure of electron gun baking
(11) Start up the electron gun.
Reference: 4.8.3 Startup of electron gun
(12) Click the [Menu] > [Maintenance] > [Electron gun] or select the [Electron gun] on the
control panel items and display the [Gun control] dialog. Click the [Electron gun aging]
button to perform the electron gun aging.
(13) Adjust the mechanical axis.
Reference: 4.9 Mechanical axis alignment
(14) Align the axis of electron beam.
NOTE: When the emission current Ie is lowered drastically after performing the [Aging],
contact our service engineer of Hitachi High-Tech Corporation.
4.6 Operation at water failure
When water supply is stopped while EO Control unit is started up, error message of E602
displays and buzzer sounds. In addition, the condition of E602 is not recovered for a while,
objective lens coil is overheated, and image observation will be shut down. In case that water
supply condition is not recovered immediately, shut down Windows and power OFF the EO
Control unit. The E602 error will be released when powering OFF the EO Control unit.
4.7 Operation for water recovery
While E602 error message is displayed, error will be cleared automatically. When EO unit
power is OFF, the operation can be performed by powering ON the EOC unit.