Hitachi SU8700 - Main Unit

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Center of gravity on each unit

SAFETY-35

SAFETY SUMMARY

Center of gravity on each unit

Main unit

* The center of gravity is based on the calculation.

Center of gravity

Main Page

About this Manual3
Important4
Leakage X-Ray Radiation from this Instrument4
Warranty on Product5
Installation, Relocation, and After-Sales Technical Service7
Disposal of Instrument7
Disposal of Cooling Water Circulator (Option)8
Service Life of Instrument8
Technical Seminars and Training for Customers8
Other Precautions9
Disclaimer of Liability for Industrial Properties of Third Party9
Handling of Chemicals9
Trademarks9
Copyrights9
Handling of the Insulation Oil Used for HV Power Supply14
User Manual Addendum for WEEE15
Information for Users on WEEE (Only for EU Countries)15
California Perchlorate Material Notice15
General Safety Guide16
Safety Alert Symbols and Signal Words16
Common Safety Precautions17
Precautions Prior to Use17
Installation, Maintenance, and Relocation18
Warnings and Cautions While Operating this Instrument18
Warning Indications in this Manual20
Caution Indications in this Manual23
Warning and Caution Labels on Instrument24
Standard Version24
SEMI-S2 Guideline Conforming Version32
EMO Switch (Option)43
Outline43
External View43
Operation Method of the EMO Switch44
Recovery Procedures after Pressing the EMO Switch45
Protection against Movement Caused by Earthquake (Option)46
Main Unit46
EO Control Unit47
Step down Transformer Unit (Option)48
Weight Unit49
Main Unit50
Other Safety Guidelines55
安全警告标签及标语的定义60
有关安全的共同注意事项61
使用前的注意事项61
安装、维护和搬迁上的注意事项62
操作手册中的警告64
操作手册中的注意66
本设备的警告标签67
标准类型67
Semi-S2 适用类型75
紧急停止开关（选件86
紧急停止开关的动作方法87
紧急停止开关动作后的复原方法88
地震防范措施（选件89
仪器本体89
降压变压器（选件91
各单元的重心位置93
仪器本体93
降压变压器（选件95
重量分配96
仪器本体96
其他注意事项98
根据《电子信息产品污染控制管理办法》有关要求102
电子信息产品污染控制标志102
有毒有害物质或元素的名称及含量表示102
本产品的电子信息产品污染控制标志表示方法103
안전한 사용을 위해104
안전 경고 기호와 표제어의 정의104
안전에 관한 공통적 주의 사항105
사용 전 주의105
설치, 보수, 장소 변경에 관한 주의106
사용 시의 경고 및 주의 사항106
취급설명서 중의 경고 표시108
취급설명서 중의 주의 표시110
본 장치의 경고 라벨111
표준 타입111
Semi-S2 대응 타입119
비상정지 스위치(옵션130
비상정지 스위치 동작 방법131
비상정지 스위치 동작 후의 복귀 방법132
지진 대책(옵션133
장치 본체133
Eo 제어 유닛134
스텝 다운 트랜스(옵션135
웨이트136
각 유닛의 중심 위치137
장치 본체137
Eo 제어 유닛138
스텝 다운 트랜스(옵션139
중량 배분140
장치 본체140
Eo 제어 유닛141
그 외의 주의 사항142
Table of Contents148
Specification and Installation Requirements156
Specifications156
Resolution156
Magnification156
Electron Optics System157
Specimen Stage157
Image Display158
Vacuum System159
Protections159
Size and Weight160
Installation Requirement161
General161
Room Temperature, Humidity, Altitude, Contamination Level and Overvoltage Category161
Power Supply162
Ground Terminal162
Compressed Air163
Water Supply and Drain163
Stray Magnetic Field164
Vibration166
Power Line Noise and Electric Field Noise167
Disturbance by Sound Waves169
Caution on Disturbance by Electromagnetic Wave169
Calorific Value170
Site Requirement171
Customer-Supplied Items173
Assemble173
Power and Ground Wire173
Others173
Function174
Parts Name175
External View of Column175
Configuration of Column176
Specimen Stage177
Specimen Current Measurement178
Vacuum System179
Condition Display Panel180
Power Switch181
Switch Board of the Instrument181
Manual Operation Panel182
Trackball (Option)184
Joystick (Option)184
UI Operation Display185
Control Panel Function187
Electron Beam187
Vacc188
Spot Intensity189
Magnification189
Preset Magnification190
Round off Magnification191
Alignment192
Auto203
Run/Freeze206
Scan207
Custom Scan209
Image Shift210
RR (Raster Rotation)210
Histogram212
Saving214
Capture224
High Resolution Capture225
Image List226
Stage Assist230
Display Mode235
Exchange Specimen238
Observation Condition239
Sem Map242
Vacuum Mode Settings245
Tilt Compensation246
Beam Marking247
Input Data248
Undo250
Wobbler Settings251
Control Panel Settings252
Sub Panel Settings255
Manual Operation Panel257
Standard Settings258
User Account271
Display Type272
Monitor Mode272
Stage Calibration273
Separator276
Control Panel Maintenance277
Electron Gun277
Electron Gun Baking279
Electron Gun Maintenance280
Adjustment of the Objective Aperture Position281
Manual Alignment283
Vacuum Display285
Maintenance of Dry Pump287
Sc (Air/Evac)287
SEM Maintenance Tools288
Maintenance Item289
Operation Panel291
Optics Tub292
Signal Tub296
Stage Tab300
Image Display Area302
Operation305
Preparation305
Confirm the Instrument Condition305
Cooling Water Supply307
Startup SU8700 Operation Program309
Set a Specimen310
Caution on Specimen Preparation310
Set the Specimen Stub to the Specimen Holder313
Operation Method of Specimen Exchange Chamber314
Operation Display of Specimen Exchange Chamber317
Operation of Specimen Exchange318
Start SEM Observation323
Electron Optics System324
Accelerating Voltage Settings324
Probe Current Settings324
Focus Settings328
Align the Electron Beam Axis (Alignment)329
Operating the Specimen Stage and Moving the Observing FOV334
Orientation of the Specimen and Display Setting334
Outline of the Specimen Stage Operation334
Movable Range of each Axis339
Stage Movable Range340
Moving the Observation FOV by the Image Shift343
Rotating the FOV344
The Magnification Setting344
Magnification Range345
Observing a Specimen347
Selecting a Detector347
Scan Speed Setting348
Controlling the Brightness and Contrast of an Image352
Focusing and Astigmatism Correction353
Recoding an Image356
Setting the Saving Condition356
Saving an Image356
Capturing an Image356
Operation of the Manual Operation Panel357
Stopping Operation358
Shutting down the Accelerating Voltage358
Removing a Specimen358
Finishing Operation359
Maintenance360
Maintenance of Electron Optical Column361
Maintaining Vacuum in Electron Gun361
Maintenance of Parts361
Maintenance of Dry Pump (Option)362
Remove the Contamination or Moisture363
Operation at Power Failure and for Complete Shutdown of Instrument365
About Shutting down the Electron Gun366
Operation after Recovery from Power Failure and for Star-Up of Instrument367
Operation at Water Failure367
Operation for Water Recovery367
Procedure of Electron Gun Baking368
Precaution in Electron Gun Baking368
Procedure of Electron Gun Baking369
Startup of Electron Gun378
Mechanical Axis Alignment379
Preparation of the Mechanical Axis Alignment379
Electron Gun Axis Alignment380
Objective Aperture Axis Alignment382
First Condenser Lens Axis Alignment383
Second Condenser Lens Axis Alignment383
Electron Current Mode Setting Lens Axis Alignment384
Precaution on Maintenance384
Replacement Parts (SU8700)385
Consumables, Life-Limited Pats, and Spear Parts385
Consumables385
Life-Limited Parts386
Spare Parts388
Accessories389
Troubleshooting392
When Vacuum System Does Not Work Normally392
When the Specimen Chamber Does Not Reach to the Specified Vacuum Status392
When the Vacuum Status of Electron Gun Is Less than the Specified Value393
When Emission Current Is Not Set to Normal Value393
When SEM Image Does Not Display on the Screen394
When Noise on Image Is Large394
When Astigmatism Cannot be Corrected395
When the Discharge Is Occurred396
When Auto Focus/Auto Stigma Function Does Not Work Properly396
When SEM Operation Program Does Not Start up397
When the PC Has Frozen397
When Error Message Is Displayed398
When Condensation Is Occurred398
Measures to Take in Emergency398
Appendix Error Message List399
EVACSEQ Error Code List433

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