Inficon XL3000flexRC User Manual

INFICON Operation | 6
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• Calibration, calibration history
• TMP error, TMP history
• Warnings, active warnings
• Maintenance, maintenance history
Control unit
• Version control unit: Information on the software version
• Memory: Information on available memory
• Settings: Control unit settings.
• Serial port wired: Information on the communication connection
• Data exchange: Information on the data exchange between mass spectrometer
module and the control unit
Mass spectrometer
module
• MSB (1): Information on the software version
• MSB (2): Information on operating parameters
• TMP controller (1): Information on the turbo molecular pump
• TMP controller (2): Information on the turbo molecular pump, continued
• Ion source: Information on the ion source used
• Preamplifier: Information on the preamplifier
• Preamplifier test: Information on the preamplifier test.
Interfaces
• I/O module (1): Information on the software version, inputs and outputs
• I/O module (2): Visualized information to the digital inputs

Inficon XL3000flexRC Specifications

General

Brand	Inficon
Model	XL3000flexRC
Category	Security Sensors
Language	English