6
Replacement and Adjustment of Belts ............................................. 6-1
6-1. Replacement and adjustment of X-axis belt (TR6SNR/TR6SNX) ........................ 6-1
6-2. Replacement and adjustment of Y-axis belt ......................................................... 6-2
6-3. Replacement and adjustment of shuttle belt (TR6SNR) ....................................... 6-3
6-4. Replacement and adjustment of shuttle belt (TR6SER/TR6SNV) ........................ 6-4
6-5. Replacement and adjustment of shuttle belt (TR6SNX) ....................................... 6-5
6-6. Replacement and adjustment of shuttle belt (TR6SXLX) ..................................... 6-6
6-7. Replacement and adjustment of transfer drive belt .............................................. 6-7
6-8. Replacement and adjustment of transfer rail broadening/narrowing belt .............. 6-8
6-9. Replacement and adjustment of transfer belt ....................................................... 6-9
7
Replacement of Pneumatic Component ........................................... 7-1
7-1. Layout diagram of pneumatic components in Y unit section ................................ 7-1
7-2. Replacement of tray chuck cylinder ...................................................................... 7-2
7-3. Replacement of solenoid valves for shutter, tray chuck and shuttle ..................... 7-3
7-4. Replacement of solenoid valves for shutter and tray chuck speed reduction
(slow 2 mode: optional) ...................................................................................... 7-4
7-5. Layout diagram of pneumatic component in X unit section .................................. 7-5
7-6. Replacement of head cylinder .............................................................................. 7-6
7-7. Replacement of X-axis vacuum pad ..................................................................... 7-7
7-8. Replacement of X-axis solenoid valve .................................................................. 7-8
7-9. Replacement of X-axis ejector ............................................................................. 7-9
7-10. Replacement of shuttle ejector ........................................................................... 7-10
7-11. Replacement of ejector filter element ................................................................. 7-11
7-12. Replacement of solenoid valves for decreasing head UP/DOWN speed
(slow 2 mode: option) ....................................................................................... 7-12
7-13. Layout diagram of pneumatic components in shuttle unit section ...................... 7-13
7-14. Replacement of BGA cylinder ............................................................................ 7-14
7-14-1. Adjustment of BGA cylinder speed controller ............................................................ 7-15
7-14-2. Adjustment of BGA cylinder speed controller (adjustment of exhaust air) ................. 7-16
7-15. Replacement of shuttle movable pad packing .................................................... 7-17
7-16. Replacement of shuttle vacuum pad .................................................................. 7-18
8
Air Piping Diagram ............................................................................. 8-1
8-1. List of air components .......................................................................................... 8-1
8-2. Diagram of air piping (standard) ........................................................................... 8-2
8-3. Air piping diagram (optional: slow 2 mode) .......................................................... 8-3