Linxon LX218 - Data for the Turbo Pump

LINXON Description | 4
LX218-Operating-Manual-en1-04-(1908) 31 / 90
Pump-down time before first
measurement
at a volume of 0.5 L
at a volume of 10 L
at a volume of 100 L
2 s
45 s
500 s
Internal calibration leak Rear side of the device
Operation mode "Sniffing"
Minimum detectable leak rate
4
He,
3
He, H
2
After AVS 2.1
< 5 x 10
-8
mbar l/s
Maximum detectable leak rate
4
He
H
2
,
3
He
1 mbar l/s
1 x 10
-2
mbar l/s
Measurement range 10
-8
… 1 mbar l/s
Measurement units for the display mbar l/s, Pa m³/s, sccm, sccs Torr*l/s,
atmcc/s
Detectable gases
4
He,
3
He, H
2
Response time < 0.1 s with 3 m sniffer line
Table4: Measuring
4.4.5 Data for the turbo pump
SplitFlow 80 Turbo pump with intermediate pumps
Volume flow for N2 60 l/s
Table5: Turbo pump