MKS 640B - Page 11

List of Tables
xi
List of Tables
Table 1: Definition of Symbols Found on the Unit ........................................................................ 2
Table 2: Interface Cables .............................................................................................................. 11
Table 3: I/O Connector Pinout ...................................................................................................... 13
Table 4: Fitting Dimension ........................................................................................................... 17
Table 5: SEMI Specifications for Down Port Fitting Options ...................................................... 22
Table 6: SEMI 2787.1 C-Seal Retainer (EG&G Part Numbers) .................................................. 23
Table 7: 0.445 Inch Diameter C-Seal Retainer ............................................................................ 23
Table 8: Initial Configuration ....................................................................................................... 28
Table 9: Highest Pressure Suggested for Zero Adjustment of an Absolute Transducer ............... 42
Table 10: Orifice Size ................................................................................................................... 55
Table 11: Valve Orifice Index Number ........................................................................................ 56
Table 12: Pressure Range Selection .............................................................................................. 64
Table 13: Fitting Type Selection ................................................................................................... 64
Table 14: Valve Type .................................................................................................................... 65
Table 15: Seal Material Selection ................................................................................................. 65
Table 16: Valve Orifice Size Selection ......................................................................................... 66
Table 17: Trip Point Model Code Entry ....................................................................................... 66
Table 18: Valve Plug Material ...................................................................................................... 67