MKS 640B - How to Connect the W-Seal (SEMI 2878.3) Fittings; Figure 11: Exploded View of the W-Seal Components

Down Port Controller Mountin
g
Instructions Chapter Two: Installation
26
How To Connect the W-Seal (SEMI 2878.3) Fittings
Note
The gaskets used in the W-seal are also referred to as IGS (Integrated Gas
Systems) gaskets. Replacement gaskets (part number UGF-6.35G) are
available from Fujikin of America, Inc.
1. Remove the protective packaging from the controller.
Fujikin has a gasket setting tool (part number IGS-Gasket-tool) available to facilitate the
assembly process.
2.
Hold the W-seal gasket by the retainer and remove the protective packaging.
3.
Use filtered nitrogen to blow clean the controller and W-seal gasket.
Caution
Be careful not to damage the gasket. A damaged gasket will not seal
properly.
4. Install the gasket and retainer into the controller.
The retainer will hold the gasket in place.
Figure 11: Exploded View of the W-Seal Components
M5-0.8 x 30 mm Long
Mounting Screw (1 of 4)
Leak Detection Port
W-Seal Gasket
and Retainer Assembly
Gasket and Retainer
Assembly Exploded
View