MKS 640B - Table of Contents

Table of Contents
v
Table of Contents
Pressure Transducer Safety Information ...................................................................................... 1
Symbols Used in This Instruction Manual ...................................................................... 1
Symbols Found on the Unit ............................................................................................ 2
Safety Procedures and Precautions ................................................................................. 3
Chapter One: General Information ............................................................................................. 5
Introduction ..................................................................................................................... 5
How This Manual is Organized ...................................................................................... 6
Manual Conventions .......................................................................................... 6
Customer Support ........................................................................................................... 7
Chapter Two: Installation ........................................................................................................... 9
How To Unpack the 640B Series Controller .................................................................. 9
Unpacking Checklist .......................................................................................... 9
Product Location and Requirements ............................................................................... 10
Interface Cables .............................................................................................................. 11
Generic Shielded Cable Description .................................................................. 12
The I/O Connector .......................................................................................................... 13
Gas Pressure and Control ................................................................................................ 15
Pressure Limits .................................................................................................. 15
Installing the Unit .............................................................................................. 15
Dimensions ..................................................................................................................... 17
Side Port Version ............................................................................................... 17
Down Port Version ............................................................................................ 19
Side Port Controller Mounting Instructions .................................................................... 21
Fittings ............................................................................................................... 21
Mounting Hardware ........................................................................................... 21
Down Port Controller Mounting Instructions ................................................................. 22
How To Connect the C-Seal Fittings ................................................................. 23
How To Connect the W-Seal (SEMI 2878.3) Fittings ....................................... 26
Initial Configuration ....................................................................................................... 28