MKS 640B - Appendix A: Product Specifications; Performance Specifications

Appendix A: Product Specifications Performance Specifications
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Appendix A: Product Specifications
Performance Specifications
Accuracy
2
0.5% Reading
CE Compliance
Electromagnetic Compatibility
3
EMC Directive 89/336/EEC
Control Range 2.0 to 100% F.S.
Control Repeatability
0.1% F.S.
Proportional Term 8 positions
(0 through 7; positions 8 and 9 repeat settings 0 and 1)
Integral Term 10 positions (0 through 9)
Leak Integrity
Internal to external
Through closed metal valve
Through closed Kel-F valve
Through closed elastomer valve
<10
-9
scc/sec He
<1% F.S. or 1 sccm (with 1 ATM P N
2
), whichever is
greater
<0.5% F.S. (with 1 ATM P N
2
)
1 x 10
-4
scc/sec He
Maximum Operating Differential
Pressure
4
Valve orifices sizes A through 4
Valve orifice sizes 5 and 6
150 psid
 30 psid
Temperature Coefficient
Zero
Span
0.04% F.S./C
0.04% Reading/C
2
Pressure output signal includes controller error, linearity, hysteresis, and repeatability.
3
An overall metal braided shielded cable, properly grounded at both ends, is required during use.
4
Consistent with the overpressure limit of the transducer within the 640B Series controller.