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MKS 640B - Table 14: Valve Type; Table 15: Seal Material Selection

MKS 640B
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Appendix D: Model Code Explanation Model Code Description
65
Valve Type (Z)
The 640B Series controller has a normally closed valve, designated by a single number.
Valve Type
Valve Order Code
Normally Closed 1
Table 14: Valve Type
Body Seal Material (Q)
The control valve can use either one of a variety of elastomer seal materials, or an all-metal seal.
Note: Valve Plug Material is specified later in the part number.
Seal Material Selection
Seal Material Order Code
Kalrez K
Metal M
Viton V
Table 15: Seal Material Selection

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