MKS 640B - How to Connect the C-Seal Fittings; Table 6: SEMI 2787.1 C-Seal Retainer (EG&G Part Numbers); Table 7: 0.445 Inch Diameter C-Seal Retainer

Chapter Two: Installation Down Port Controller Mountin
g
Instructions
23
How To Connect the C-Seal Fittings
Note
This section covers the mounting instructions for both the SEMI 2787.1
compliant and 0.445” diameter C-seals.
1. Select the retainer and screws appropriate for the type of C-seal.
There are two types of seal assemblies available:
 Alpha-C™ is a nickel clad Inconel
®
718 C-seal in a stainless retainer
 Beta-C™ is an all 316L VIM/VAR stainless steel C-seal in a stainless steel retainer
SEMI 2787.1 C-Seal Retainer (EG&G Part Numbers)
Type of C-Seal Part Number
Alpha-C™ 201015
Beta-C™ 201027
The SEMI 2787.1 retainer is 0.004” thick. The gland
depth is 0.024” in both the substrate and the controller
Table 6: SEMI 2787.1 C-Seal Retainer (EG&G Part Numbers)
0.445 Inch Diameter C-Seal Retainer
(EG&G Part Numbers)
Type of C-Seal
Substrate
Gland Depth
Part
Number
Alpha-C™ 0.020
0.030
201002
201050
Beta-C™ 0.020
0.030
201031
201043
The retainer is 0.009” thick for the 0.020 gland depth
The retainer is 0.004” thick for the 0.030 gland depth
Table 7: 0.445 Inch Diameter C-Seal Retainer
2.
Remove the protective packaging from the controller.
3.
Hold the C-seal gasket by the retainer and remove the protective packaging.