MKS 640B - Page 74

Appendix C: Gas Densit
y
Table
62
GAS SYMBOL DENSITY
g/l @ 0
o
C
Sulfur Hexafluoride
Trichlorofluoromethane
(Freon - 11)
Trichlorosilane
1,1,2-Trichloro - 1,2,2-Trifluoroethane
(Freon - 113)
Tungsten Hexafluoride
Xenon
SF
6
CCl
3
F
SiHCl
3
CCl
2
FCClF
2
or
(C
2
Cl
3
F
3
)
WF
6
Xe
6.516
6.129
6.043
8.360
13.28
5.858
NOTE: Standard Pressure is defined as 760 mmHg (14.7 psia) Standard Temperature is defined as 0
o
C.