MKS 640B - Page 84

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Table of Contents5
Pressure Transducer Safety Information13
Symbols Used in this Instruction Manual13
Symbols Found on the Unit14
Table 1: Definition of Symbols Found on the Unit14
Safety Procedures and Precautions15
Chapter One: General Information17
Introduction17
How this Manual Is Organized18
Manual Conventions18
Customer Support19
Chapter Two: Installation21
How to Unpack the 640B Series Controller21
Unpacking Checklist21
Product Location and Requirements22
Interface Cables23
Table 2: Interface Cables23
Generic Shielded Cable Description24
The I/O Connector25
Table 3: I/O Connector Pinout25
Gas Pressure and Control27
Pressure Limits27
Installing the Unit27
Figure 1: Downstream Pressure Control28
Figure 2: Upstream Pressure Control28
Dimensions29
Side Port Version29
Figure 3: Front and Back Views of the Side Port 640B Series Controller29
Table 4: Fitting Dimension29
Figure 4: Side View of the 640B Series Controller30
Down Port Version31
Figure 5: Top View of the down Port Type 640B Controller31
Figure 6: Front and Side View of the down Port Type 64031
Figure 7: Bottom View of the down Port 64032
Figure 8: Bottom View of the down Port Seals32
Side Port Controller Mounting Instructions33
Fittings33
Mounting Hardware33
Figure 9: Bottom View of the Side Port 640B Series Controller33
Down Port Controller Mounting Instructions34
Table 5: SEMI Specifications for down Port Fitting Options34
How to Connect the C-Seal Fittings35
Table 6: SEMI 2787.1 C-Seal Retainer (EG&G Part Numbers)35
Table 7: 0.445 Inch Diameter C-Seal Retainer35
Figure 10: Exploded View of the C-Seal Components36
How to Connect the W-Seal (SEMI 2878.3) Fittings38
Figure 11: Exploded View of the W-Seal Components38
Initial Configuration40
Table 8: Initial Configuration40
Chapter Three: Overview43
General Information43
Pressure Control Range43
Figure 12: Top View of the 640B Series Controller43
A Typical Control System44
How the 640B Series Pressure Controller Works45
Figure 13: Sample Pressure Control System45
Tuning the 640B Series Pressure Controller46
Proportional Term46
Figure 14: Effects of the Proportional Control46
Integral Term47
Figure 15: Effects of the Integral Control47
Tuning the 640B Controller48
Figure 16: Controller Response with Initial P Term and I Term Values48
Figure 17: Controller Response with Increased P Term49
Figure 18: Controller Response with Increased I Term49
Priority of Commands50
Trip Points51
Action of the Trip Points51
Applications with a Large Differential Pressure52
Labels52
Figure 19: Serial Number Label52
Chapter Four: Operation53
How to Check the Zero53
How to Zero a Type 640B (Absolute) Unit53
How to Zero a Type 641 (Gage) Unit54
Table 9: Highest Pressure Suggested for Zero Adjustment of an Absolute Transducer54
How to Adjust the Span55
How to Tune the 640B Series Controller55
How to Adjust the Trip Point Values56
How to Select the Trip Point Action57
Figure 20: Jumper Positions on the Transducer Board57
How to Use Trip Points as Error Indicators59
How to Change the Pressure Output Signal Range60
How to Select Upstream Control61
Figure 21: Switch Settings on the Control Board61
Appendix A: Product Specifications63
Performance Specifications63
Environmental Specifications64
Trip Point Specifications64
Physical Specifications65
Appendix B: Valve Orifice Selection67
General Information67
Checking the Orifice Size67
Table 10: Orifice Size67
How to Verify the Orifice Selection68
Table 11: Valve Orifice Index Number68
Using Different Gases70
Appendix C: Gas Density Table71
Appendix D: Model Code Explanation75
Model Code Description75
Figure 22: Model Code Explanation76
Table 12: Pressure Range Selection76
Table 13: Fitting Type Selection76
Table 14: Valve Type77
Table 15: Seal Material Selection77
Table 16: Valve Orifice Size Selection78
Table 17: Trip Point Model Code Entry78
Table 18: Valve Plug Material79
Index81

MKS 640B - Page 84

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