MKS 640B - Page 9

List of Fi
g
ures
ix
List of Figures
Figure 1: Downstream Pressure Control ..................................................................................... 16
Figure 2: Upstream Pressure Control .......................................................................................... 16
Figure 3: Front and Back Views of the Side Port 640B Series Controller.................................. 17
Figure 4: Side View of the 640B Series Controller .................................................................... 18
Figure 5: Top View of the Down Port Type 640B Controller .................................................... 19
Figure 6: Front and Side View of the Down Port Type 640 ....................................................... 19
Figure 7: Bottom View of the Down Port 640 ............................................................................ 20
Figure 8: Bottom View of the Down Port Seals ......................................................................... 20
Figure 9: Bottom View of the Side Port 640B Series Controller ................................................ 21
Figure 10: Exploded View of the C-Seal Components ............................................................... 24
Figure 11: Exploded View of the W-Seal Components .............................................................. 26
Figure 12: Top View of the 640B Series Controller .................................................................... 31
Figure 13: Sample Pressure Control System ............................................................................... 31
Figure 14: Effects of the Proportional Control ........................................................................... 33
Figure 15: Effects of the Integral Control ................................................................................... 34
Figure 16: Controller Response with Initial P Term and I Term Values .................................... 35
Figure 17: Controller Response with Increased P Term ............................................................. 36
Figure 18: Controller Response with Increased I Term .............................................................. 37
Figure 19: Serial Number Label ................................................................................................. 40
Figure 20: Jumper Positions on the Transducer Board ............................................................... 40
Figure 21: Switch Settings on the Control Board ........................................................................ 45
Figure 22: Model Code Explanation ............................................................................................ 55
Figure 23: Flow Range Selection ................................................................................................. 57