MKS SENTRY 1510A - Troubleshooting: Measured Exhaust Unstable

Instruction Manual #122162 46
7.2.1 Measured Exhaust is Not Stable
Is the TIM-100/120 power
on?
Contact Technical Support or
replace the 1510.
Are all downstream
dampers fully open?
Fully open all dampers.
No
Is N2 Supply on and
between 40 - 100 PSI?
Is process pressure sense
line connected?
Is process chamber fully
sealed?
Check all fittings on process
side of the Sentry 1510 for
leaks.
Yes
Yes
Yes
Yes
Turn on N2 and adjust
regulator for 40 - 100 PSI
Connect process sense line
Seal chamber
Eliminate leaks
Yes
No
No
No
No
Is the P-Trap filled with fluid
or drain isolation valve
closed?
Fill P-Trap or close isolation
valve
No
Yes
Set Gain to Zero
Reduce “Gain Fine”
parameter to half of original
value.
Control unstable
Control unstable
Turn on TIM-100/120
Yes
Control unstable
Control stable
ststable