MKS SENTRY 1510A - Page 48

Instruction Manual #122162 48
7.2.3 Measured Process Pressure is Less than Set Point
Is set point controlled
locally at the TIM-
100/120 or via the
analog 0-5 VDC?
0-5 VDC
Ensure StptMode is set to
Single and SP1 equals
your desired set point.
Local Control
Ensure StptMode is set to
Analog
Verify connections to your
process tool and verify
line voltages to the TIM.
(See installation and
setup instructions.)
Yes
Verify that “Aux In”
parameter equals the
desired voltage (5000=
5.000 V).
Yes
Contact Technical
Support or replace the
TIM.
Yes
Is the TIM-100/120 power
on?
Turn on TIM-100/120
power
Is the desired set point
indicated next to Pres SP?
No
Yes
No
Set TIM-100/120
Parameter StepLim to
Off
Is the TIM-100/120
Parameter Step Limit Off?
No
Yes
Replace Sentry 1510
Are all downstream
dampers fully open?
Fully open all dampers.
No
Is N2 Supply on and
between 40 - 100 PSI?
Is process pressure sense
line connected?
Is process chamber fully
sealed?
Check all fittings on process
side of the Sentry 1510 for
leaks.
Yes
Yes
Yes
Yes
Turn on N2 and adjust
regulator for 40 - 100 PSI
Connect process sense line
Seal chamber
Eliminate leaks
Yes
No
No
No
No
Is the P-Trap filled with fluid
or drain isolation valve
closed?
Fill P-Trap or close isolation
valve
No
Yes
Yes