20
The thick samples or metal samples can be observed with
following methods.
· Lower the stage holder mounting position:
The sample with the height up to 65 mm can be observed.
(Note, if the right hand control 150 mm x 100 mm stage
(U-SIC64) is combined, the sample height is up to 63 mm.)
For procedures to lower the the stage holder mounting
position, see "Removing the stopper of the stage holder"
(page 95)
· Attach the height adapter (BX3M-ARMAD) to the
microscope frame:
The sample with the height up to 105 mm can be
observed.
(Note, if the right hand control 150 mm x 100 mm stage
(U-SIC64) is combined, the sample height is up to 103 mm.)
If the clamping screw
a
of the stage holder is loosened,
the stage falls. Be sure to hold the stage firmly while
loosening the clamping screw.
Hold the stage surely and loosen the clamping screw
a
of the stage
holder with the Allen screwdriver.
Move the stage up and down to find the desired position and tighten
the calming screw
a
at the desired postilion.
1
2
2
Adjusting the stage height
2
a
Place the sample on the stage plate or the holder plate before
observation.
· If the sample is not flat and/or parallel, the reflected light
does not return to the objective and you cannot perform the
observation.
· If you observe the large-size sample, remove the stage plate
and place the sample on the stage directly.
· When using the wafer holder plate, turn the wafer holder using
the knob
a
.
· When using the glass holder plate, you can observe with
the transmitted light illumination. The BX53MTRF-S system
is required for the observation with the transmitted light
illumination.
1
a
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