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If it is too tight to raise the Y-axis knob
b
in
1
, lock the
stage movement with the Y-axis lock lever
e
once, and turn
the Y-axis knob
b
to raise the Y-axis knob.
b
e
Stage knob rubber (option)
Fitting this knob rubber to the X-axis knob and/or Y-axis knob
of the stage U-SVRM/SVLM and/or U-SIC64 prevents knobs
from slipping and allows the fine stage operation only by
holding it lightly. Also, the fatigue caused by the long-hour
operation can be reduced.
There are 2 types of knob rubbers: U-SHGT (thick type: 5 mm)
and U-SHG (thin type: 2 mm).
Procedures to attach the knob rubber
Fit the larger part to the Y-axis (upper side) knob from below first and
then, fit the smaller part the X-axis (lower side) knob from below.
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