SCS LABCOTER 2 - Page 56

Rev 37 Operator’s Manual OM-610-1002-1
page 48 SECTION 6 MAINTENANCE PDS-2010
Setup Mode
Parameter Furnace Chamber
Gauge
Vaporizer Vacuum
FiLt
2 2 2 2
OFFS
0 0 0 0
PPLJ
read only read only read only read only
Pb_P
1.0 1.0 5.0 0.5
ArST
2.37 0.41 2.00 3.00
rAtE
0.39 0.10 0.30 1.40
biAS
25 25 25 25
SPuL
720 140 180 100
SPLL
0 0 0 -4
OPuL
100 100 100 100
Ct 1
32 32 32 32
bAL 1
20 10 ---- ----
PhA 1
---- ---- 200 ----
PLA 1
---- ---- ---- 15
AHY 1
1 1 1 1
PhA 2
---- ---- 174 ----
AHY 2
---- ---- 1 ----
APt
diSA diSA diSA diSA
PoEn
diSA diSA diSA diSA
SPr
diSA diSA diSA diSA
rP
SP
690 135 175 35
Sloc
10 10 10 10