Shimadzu EI-D3203M - Page 38

5.3 Connection of the Pump to the Power Supply Unit
25
Power Supply Unit
INSTRUCTION MANUAL
5
Fig.5-11 Connection of Cables
AC INPUT.
MOTOR
MAG. BRG.
CONTROL CABLE
MOTOR CABLE
POWER CABLE
WIDE RANGE TYPE
TURBO MOLECULAR PUMP
POWER SUPPLY UNIT
EI-Dxx03M
CONTROL CABLE
POWER SUPPLY UNIT
EI-Dxx03M
AC INPUT
MOTOR
MAG.BRG.
POWER CABLE
AIR COOLED TYPE
TURBO MOLECULAR PUMP
FAN CODE
MOTOR CABLE