VAT 642 Series - Connection Overview

Series 642 INSTALLATION
813316EB Edition 2017-11-24 17/
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4.2.2 Connection overview
System:
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable(s)
6 Cable to remote control unit
7 Cable to power supply
8 Controller
9 Connection cable controller / actuator
10 Actuator
11 Pump
Actuator Controller
M
3
4
5
6
7
2
1
9
8
10
11