VAT 642 Series Installation And Operating Instructions

Series 642 INSTALLATION
813316EB Edition 2017-11-24 47/
107
4.6.8 Pressure control configuration
System Configuration
Constant gas flow available
Constant gas flow not
available
Tv*<= 500 sec Tv* > 500 sec
Adaptive pressure
controller
(Refer to chapter:
Pressure controller)
Fixed pressure controller
(Refer to chapter: Pressure controller)
Fixed pressure controller
(Refer to chapter: Pressure controller)
Soft Pump Soft Pump (Refer to chapter: Pressure controller)
Use the formula below to define the applicable pressure control algorithm.
q
L
gasflow for learn [mbarl/s]
p
SFS
sensor full scale pressure [mbar]
Tv* Vacuum time constant [sec]
CV Chamber Volume [l]
P
SFS
•
CV
Tv =
q
L
Upstream
Process
chamber
Control
valve
Pump
Downstream
Process
chamber
Control
valve
Pump

VAT 642 Series Specifications

General

Brand	VAT
Model	642 Series
Category	Control Unit
Language	English