Series 642 OPERATION
813316EB Edition 2017-11-24 71/
5 Operation
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
WARNING
Valve opening
Risk of serious injury.
Human body parts must be kept out of the valve opening and away from moving parts.
Do not connect the controller to power before the valve is installed complete into the
system.
5.1 Normal operation
This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a
pressure control mode or a position control mode. In both cases local or remote operation is possible.
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