Operating in EI Mode 4
5977B Series MSD Operating Manual 101
To Monitor High Vacuum Pressure
Pressure monitoring requires an optional G3397B Micro-Ion vacuum gauge.
Procedure
1 Ensure that the hydrogen supply shutoff valves are closed if you are using
hydrogen as a carrier gas or for the JetClean system.
2 Start up and pumpdown the MSD. (See “To Pumpdown the MSD” on
page 116.)
3 In the Tune and Vacuum Control view, select Turn Vacuum Gauge on/off from the
Vacuum menu.
4 Select Manual Tune from the Parameters menu to display the Manual Tune
dialog.
5 Select the Values tab to view the HiVac reading. (See Figure 31 on page 102.)
If you are using hydrogen as a carrier gas or for the JetClean system, the hydrogen
gas flow must be off before turning off the MSD power. If the foreline pump is off,
hydrogen will accumulate in the MSD and an explosion may occur. Read “Hydrogen
Safety” on page 23 before operating the MSD with hydrogen gas.
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