8CI Maintenance
To Install a CI Source Filament
5977B Series MSD Operating Manual 249
To Install a CI Source Filament
Materials needed
• Filament assembly, 2-pk, CI (G7005-60072)
• Gloves, clean, lint-free
• Large (8650-0030)
• Small (8650-0029)Tweezers (8710-2460)
Procedure
1 Remove the old filament. (See“To Remove the CI Source Filament” on
page 247.)
2 Place the new filament into its position on the ion source body. (See
Figure 81 on page 248.)
3 Secure the filament to the ion source body with the screw. (See Figure 81 on
page 248.)
4 After installing the filament, verify that it is not grounded to source body.
5 Reinstall the CI source. (See“To Install the CI Source” on page 250 or
“General Information” on page 222.)
6 Pumpdown the MSD. (See“To Pumpdown the MSD in CI Mode” on
page 148.)
7 Autotune the MSD.
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