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ASP sterrad NX - Page 13

ASP sterrad NX
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Sterilizer Overview
Exposure 2
The steps
in
Exposure 1 are repeated.
The
STERRAO@
NX
Sterilization
Cycle
Phase Order
Exposure I
Exposure 2
2
Stages
Delivery 1
Pumpdown I
Transfer 1
Diffusion 1
Plasma Pumpdown I / Plasma I
Vent I
Delivery 2
Vaporization Pumpdown 2
Chamber Pumpdown 2
2
Diffusion 2
. Plasma Pumpdown 2 / Plasma 2
Final Vent
NX'" User's Guide
16

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