ASP sterrad NX - Page 94

Troubleshooting
I VACUUM
INSUFFICIENT FOR
PLASMA
· VAPORIZER PRESSURE
RAILED HIGH
· VAPORIZER PRESSURE
RAILED LOW
VAPORIZER
TEMPERA TURE DID
NOT DROP
• VAPORIZER
· TEMPERATURE DID
• NOT RISE
VAPORIZER
I TEMPERATURE RAILED
• HIGH
VAPORIZER
TEMPERATURE RAILED
LOW
VENT SENSOR STUCK
CLOSED
OPEN
VENT VALVE
• COMMAND ALWAYS
• CLOSED
VENT VALVE
COMMAND ALWAYS
OPEN
VENT VAL
VE
PARTIALLY OCCLUDED
VENT VAL VE STUCK
or wet load
Vacuum valve sensor
Vacuum valve sensor failure.
Vaporizer pressure always
reads 200 torr.
Vaporizer pressure always
reads 0 torr.
will not shut
heater/sensor not
disconnected.
Vent valve electrical failure.
Vent valve electrical failure.
Filter on vent valve needs
or replacement.
Vent valve mechanical
your ASP Customer Care
Call your ASP Customer Care
Representative.
Call your ASP Customer Care
Representative.
your ASP Customer Care
Representative.
Call your ASP Customer Care
Representative.
Call your ASP Customer Care
Representative.
Call your ASP Customer Care
Call your ASP Customer Care
Representative.
Call your ASP Customer Care
Representative.
Call your ASP Customer Care
Representative.
Call your ASP Customer Care
STERRADi!!l NX'M User's Guide 100