©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 5-3
Document Title
9. Ensure that the pressure gauge reads the proper value as shown in
Table 4-1. If additional gas pressure is required, refer to “Adding
Helium” in this section. If gas pressure needs to be reduced, refer to
“Reducing Helium Pressure” in this section.
10. Record the adsorber replacement date on the label as shown in
Figure 5-2, and also note that the next adsorber replacement should
be performed every three years.
Figure 5-2: Adsorber Location, 9600 Compressor (Rear Panel Removed)
Adsorber
Mounting
Bolt
Adsorber
DATE
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