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Brooks 9600 - Page 68

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Table of Contents

Table of Contents3
Safety Conventions11
Introduction11
Signal Word Descriptions11
Safety Shape Descriptions12
References12
Section 1 - 9600 Compressor Description13
General13
Compressor Configurations13
System Documentation13
BROOKS-CRYOGENICS Helium Refrigeration System13
Specifications15
Dimensions15
Weight17
Electrical17
Cooling Water18
General19
Component Description19
System Circuit Breaker21
Elapsed Time Meter21
Control Circuit Breaker21
Power on Indicator21
Gas Charge Flared Fitting21
Helium Pressure Gauge22
Power Inlet22
Return Gas Coupling22
Cooling Water in22
Cooling Water out22
Cryopump Electrical Outlet22
Compressor Remote Connector23
Supply Gas Coupling23
Multiple On-Board Cryopump Connections24
Multiple Cryo-Torr Cryopump Connections24
Section 2 - Unpacking and Inspection27
Introduction27
Shipping Carton Inspection27
Removal from Shipping Carton27
Compressor Inspection28
Compressor28
Helium "OFF" Condition Pressure Verification28
Shipping Carton Contents28
Section 3 - Installation29
Introduction29
Supply and Return Water Line Connections30
Hard Water Lines31
Flexible Water Lines31
Electrical Connections32
Power Cable Preparation32
Phase Check34
Connecting/Disconnecting Helium Flex Lines35
Connecting35
Disconnecting35
Single On-Board Cryopump Connections36
Single Cryo-Torr Cryopump Connections37
Multiple On-Board Cryopump Connections39
Helium Line Connections39
Power Cable Connections39
Multiple Cryo-Torr Cryopump Connections42
Helium Line Connections42
Power Cable Connections42
Section 4 - Operation45
Adjusting System Helium Pressure45
OFF" Condition Helium System Pressure Verification45
Compressor Operation46
Replacement of Helium Circuit Components47
Section 5 - Maintenance49
Scheduled Maintenance49
Suggested Maintenance Equipment49
Adsorber Replacement50
Adjusting System Helium Pressure52
Reducing Helium Pressure52
Increasing Helium Pressure53
Adding Helium53
Appendix A: Customer Brooks Automation Technical Support Information55
Appendix B - Flow Diagram57
Appendix C - Troubleshooting Procedures59
Troubleshooting the Compressor59
Technical Inquiries59
Appendix D - Schematic63
Introduction63

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