Brooks 9600 - Page 69

©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 Index-1
Document Title
A
Adsorbers
replacing, 5-2
B
Brooks Automation
contact information, Front-ii
C
Circuit breaker
system, 1-9
Components
compressor remote connector, 1-11
control circuit breaker, 1-9
cooling water IN, 1-10
cryopump electrical outlet, 1-10
description, 1-7
elapsed time meter, 1-9
gas charge flared fitting, 1-9
helium pressure gauge, 1-10
multiple Cryo-Torr connections, 1-12
multiple on-board cryopump connections, 1-12
power inlet, 1-10
power on indicator, 1-9
return gas coupling, 1-10
system circuit breaker, 1-9
Compressor
configurations, 1-1
description, 1-1
remote connector, 1-11
starting, 4-2
Connecting/disconnecting helium lines, 3-7
Connections
single On-Board, 3-8
Control circuit breaker, 1-9
Cooling water, 1-6
IN, 1-10
Cryopump
electrical outlet, 1-10
D
Documentation
system, 1-1
Index