Brooks 9600 - Page 70

Index-2 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
E
Elapsed time
meter, 1-9
Electrical connections
installing, 3-4
F
Flow diagram, B-1
G
Gas charge
flared fitting, 1-9
H
Helium
adding, 5-5
Helium circuit components
replacing, 4-3
Helium flex lines
connecting/disconnecting, 3-7
Helium pressure
adjusting, 4-1
gauge, 1-10
Helium refrigeration system
overview, 1-1
Helium system pressure
adjusting, 5-4
increasing, 5-5
reducing, 5-4
verifying OFF condition, 4-1
I
Installing the compressor, 3-1–3-16
M
Maintenance
scheduled, 5-1
Maintenance procedures, 5-1–5-6
Multiple connections, 1-12
Cryopump, 1-12
Multiple Cryo-Torr connections, 3-14
Multiple On-Board connections, 3-11
O
OFF Condition
helium system pressure
verification, 4-1
Operating the compressor, 4-1
P
Phase check
performing, 3-6
Power inlet, 1-10
Power on indicator, 1-9
R
Return gas coupling, 1-10
S
Safety precautions, S-1
Schematic
control assembly legend, D-1
On-Board Cryo electrical, D-2
On-Board output module legend, D-3
Schematic diagram, D-1
Single On-Board connections, 3-8
Specifications, 1-3
Starting the compressor, 4-2
Supply and return water connections
installing, 3-3
T
Troubleshooting, C-1–C-3
U
Unpacking, 2-1–2-2
W
Water
cooling, 1-6