Brooks 9600 - Page 9

©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 vii
Tables
Table 1-1:Compressor Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-2:Electrical Input Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-3:Cooling Water Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Table 1-4:General Compressor Operating Specifications . . . . . . . . . . . . . 1-7
Table 1-5:Cryopump Electrical Outlet Pin Assignments . . . . . . . . . . . . . 1-11
Table 1-6:Compressor Remote Connector Pin Assignments . . . . . . . . . . 1-11
Table 4-1:9600 Compressor Helium ("OFF" Condition) Charge. . . . . . . . 4-1
Table 5-1:Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . 5-1
Table C-1:Compressor Troubleshooting Procedures . . . . . . . . . . . . . . . . . C-2
Table D-2:Basic Control Assembly Legend. . . . . . . . . . . . . . . . . . . . . . . . D-1
Table D-3:On-Board/Cryo Electrical Module P/N 8135127G001 Legend D-2
Table D-4:On-Board Output Module P/N 8135148G001 Legend . . . . . . . D-3