Polycold Cryochiller Appendices
Installation and Operation Manual Appendix E: Water Vapor Cryotrapping
Brooks Automation
214072 Revision B
12-9
The average cryosurface temperature is a convenient number to use when there is a temperature gra-
dient between the coil inlet and coil outlet temperatures. The average cryosurface temperature is simply
the average of the coil inlet and coil outlet temperatures. In non-cryopumping applications, such as
those used for heat removal, it is the coil outlet temperature that is most important.
Table 12-1: Cryosurface Temperature needed for desire Water Vapor Partial Pressure
Desired Water
Vapor Partial
Pressure
Cryosurface Temperature Needed, °C
torr mbar 98% 95% 90% 80% 60% 20% 0%
5.0E+00 6.7E+00 -40.8 -32.3 -25.4 -18.2 -10.5 -2.3 1.0
2.0E+00 2.7E+00 -48.7 -40.8 -34.4 -27.7 -20.6 -13.0 -9.7
1.0E+00 1.3E+00 -54.3 -46.8 -40.8 -34.4 -27.7 -20.6 -17.3
5.0E-01 6.7E-01 -59.7 -52.6 -46.8 -40.8 -34.4 -27.7 -24.5
2.0E-01 2.7E-01 -66.4 -59.7 -54.3 -48.7 -42.8 -36.5 -33.4
1.0E-01 1.3E-01 -71.2 -64.8 -59.7 -54.3 -48.7 -42.8 -39.7
5.0E-02 6.7E-02 -75.8 -69.7 -64.8 -59.7 -54.3 -48.7 -45.6
2.0E-02 2.7E-02 -81.5 -75.8 -71.2 -66.4 -61.4 -56.1 -53.1
1.0E-02 1.3E-02 -85.6 -80.1 -75.8 -71.2 -66.4 -61.4 -58.4
5.0E-03 6.7E-03 -89.6 -84.3 -80.1 -75.8 -71.2 -66.4 -63.5
2.0E-03 2.7E-03 -94.6 -89.6 -85.6 -81.5 -77.2 -72.7 -69.9
1.0E-03 1.3E-03 -98.2 -93.4 -89.6 -85.6 -81.5 -77.2 -74.4
5.0E-04 6.7E-04 -101.6 -97.0 -93.4 -89.6 -85.6 -81.5 -78.8
2.0E-04 2.7E-04 -106.0 -101.6 -98.2 -94.6 -90.8 -86.9 -84.3
1.0E-04 1.3E-04 -109.1 -104.9 -101.6 -98.2 -94.6 -90.8 -88.2
5.0E-05 6.7E-05 -112.2 -108.1 -104.9 -101.6 -98.2 -94.6 -92.0
2.0E-05 2.7E-05 -116.0 -112.2 -109.1 -106.0 -102.7 -99.3 -96.8
1.0E-05 1.3E-05 -118.8 -115.1 -112.2 -109.1 -106.0 -102.7 -100.3
5.0E-06 6.7E-06 -121.5 -117.9 -115.1 -112.2 -109.1 -106.0 -103.6
2.0E-06 2.7E-06 -125.0 -121.5 -118.8 -116.0 -113.1 -110.1 -107.8
1.0E-06 1.3E-06 -127.5 -124.1 -121.5 -118.8 -116.0 -113.1 -110.8
5.0E-07 6.7E-07 -129.9 -126.7 -124.1 -121.5 -118.8 -116.0 -113.8
2.0E-07 2.7E-07 -132.9 -129.9 -127.5 -125.0 -122.4 -119.7 -117.5
1.0E-07 1.3E-07 -135.2 -132.2 -129.9 -127.5 -125.0 -122.4 -120.2
5.0E-08 6.7E-08 -137.3 -134.5 -132.2 -129.9 -127.5 -125.0 -122.8
2.0E-08 2.7E-08 -140.1 -137.3 -135.2 -132.9 -130.6 -128.2 -126.2
1.0E-08 1.3E-08 -142.1 -139.5 -137.3 -135.2 -132.9 -130.6 -128.6
5.0E-09 6.7E-09 -144.1 -141.5 -139.5 -137.3 -135.2 -132.9 -131.0
2.0E-09 2.7E-09 -146.6 -144.1 -142.1 -140.1 -138.0 -135.9 -133.9
1.0E-09 1.3E-09 -148.4 -146.0 -144.1 -142.1 -140.1 -138.0 -136.1
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