Brooks Polycold MaxCool Series - Page 96

Installation Polycold Cryochiller
Preliminary Check of the Polycold Cryochiller Installation and Operation Manual
Brooks Automation
4-40 214072 Revision B
Figure 4-31: Illustration of Cold Valve Box with Valve Names
* asterisk denotes optional item
MV102
Cold Gas Feed
VLV11 *
Cool Ckt 2
VLV5
Cool Ckt 1
MV101
Hot Gas Feed
MV103
Common
Return
MV107
Evac Ckt 1
Circuit 1
Feed Line
Circuit 1
Return Line
Circuit 2
Feed Line
Circuit 2
Return Line