SCU-1600 Control Unit for Turbomolecular Pump
March 10 vi Issue 1-a
PAGE
vi
ILLUSTRATIONS
Figure Title Page
1 High voltage device caution label 3
2 Safety instruction label 4
3 Caution label 4
4 Connector caution label 4
5 Voltage rating label 4
6 Label affixing positions 5
7 SCU-1600 control unit 6
8 Configuration of the STP pump with the TMS 7
9 SCU-1600 dimensions (mm) 11
10 SCU-1600 front panel 13
11 SCU-1600 rear panel 16
12 Installing the SCU-1600 18
13 Example of securing the SCU-1600 19
14 STP pump connection cable 21
15 TMS connection cable (with distribution box) 22
16 TMS connection cable (without sensor cable) 23
17 TMS connection cable (with sensor cable) 23
18 Power cable (without plug) 24
19 Power cable (with plug) 25
20 Connecting method of the power cable without plug 26
21 REMOTE X7 connector 28
22 Connector X3A, X3B (D-sub 9) 28
23 Tuning procedures 31
25 Parameter setting method 40
26 Parameter setting method (continued) 41
27 Parameter setting method (continued) 42
28 Parameter setting method (continued) 44
29 Manual operation method 45
30 Operational procedures 50
31 REMOTE X7 input signal pins 54
32 REMOTE X7 output signal pins 58
33 Serial communication 65
34 Connector X3A/X3B (D-sub 9) 66
35 Connector X7 (D-sub 37) 66
36 RS485 connections 68
37 PC to SIM communication 69
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