Edwards SCU-1600 - Page 11

SCU-1600 Control Unit for Turbomolecular Pump
March 10 vii Issue 1-a
PAGE
vii
TABLES
Table Title Page
1 Turbomolecular pumps 6
2 SCU-1600 front panel functions 14
3 SCU-1600 front panel functions (continued) 15
4 SCU-1600 rear panel connection 16
5 Power cable 25
6 User setting data list 32
7 Causes of "CAUTION" at the self test state 48
8 REMOTE X7 input signal pins 52
9 REMOTE X7 input signal pins (continued) 53
10 REMOTE X7 output signal pins 56
11 REMOTE X7 output signal pins (continued) 57
12 Rated contacts for relays CR1 to CR9 59
13 Starting/Stopping the STP pump
during remote operation (REMOTE X7) 59
14 Rotation INHIBIT signal input 60
15 Second speed function 62
16 Reset operation during remote operation (REMOTE X7) 63
17 X3A/X3B pin position 65
18 X7 pin position 66
19 Communication parameters 69
20 Transmission control characters 70
21 Pump operation commands 78
22 Command list 79
23 Pump operation commands 81
24 Error message values 83
25 Error message values (continued) 84
26 Pump operation mode 85
27 Remote mode 90
28 Warning value bit assign 94
29 Option function number and parameter list 98
30 Option function number and parameter list 100
31 Functions of STP-Link 103
32 Backup rotational speed 105
33 States of LCD, LEDs and REMOTE output signals
at a power failure 106
34 Accumulated damage point and warning message 110
35 Default setting of "WARNING" function 113
36 Factory setting and variable range 113
37 Error messages at self test state 114
38 Error messages after self test 117
39 Error messages after self test (continued) 118
40 Error messages after self test (continued) 119
41 Error messages after self test (continued) 120
42 Error messages after self test (continued) 121
43 Error messages after self test (continued) 122
44 Error messages after self test (continued) 123
45 Troubleshooting when powering ON 124
46 Troubleshooting when performing the STP pump
start operation 124
47 Troubleshooting while the STP pump is rotating 125