SCU-1600 Control Unit for Turbomolecular Pump
March 10 117 Issue 1-a
7
MAINTENANCE
Referred
section
3.4.1
3.4.3
3.4.1
3.4.3
Countermeasures
Check the vacuum piping
system for leakage. Check the
exhaust sequence.
Contact Service office.
1. Turn on the power after
resetting.
2. Contact Service office.
Contact Service office.
1. Set the ambient
temperature to 40 ºC (104
ºF) or less.
2. Remove obstacle from the
ventilation port.
1. Set the ambient
temperature to 40 ºC (104
ºF) or less.
2. Remove obstacle from the
ventilation port.
Probable causes
Atmospheric air flows the STP
pump.
Failure of the SCU-1600.
1. Malfunction by external
noise.
2. Failure of the SCU-1600.
Short-circuit or ground fault in
the connection cable or at
connector part.
1. High ambient temperature.
2. Insufficient cooling of the
SCU-1600.
3. High ambient temperature.
4. Insufficient cooling of the
SCU-1600.
Pump operation
Decelerate and stop,
then Touch down.
The magnetic
bearing output stops
and the rotor is
descended on the
protection bearing.
Free run.
*1
Stop
Touch down. The
magnetic bearing
output stops and the
rotor is descended
on the protection
bearing.
Continuance of
rotation.
Decelerate and stop.
Occurrence condition
Rotational speed rises
when deteriorating or
stopping.
When the rated operation
does not stop approx. 30
min. after start operation is
executed.
Accelerate up to 500 rpm
or less.
Excessive magnetic
bearing electric current.
Overheat inside the
SCU-1600.
Overheat inside the
SCU-1600.
LCD Messages
Aberrant Accel
Aberrant Brake
Accel Malfunction
Amp Overcurrent
CAUTION:
CNT heat1
CNT Overheat 1
*1
The driver output stops and the rotor continue rotating by inertia. It may take several hours to stop. To stop the STP pump quickly, close the vacuum valve at the outlet port
flange and introduce gas from the purge port into the STP pump.
Table 38 - Error messa
es after self tes
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