Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 118 Issue 1-a
7
MAINTENANCE
Referred
section
3.9 Instruction Manual(A)
Countermeasures
1. When changing the cable
length, perform tuning.
2. Contact Service office. 1. Remove external vibration
so as not to transmit it to the STP pump.
2. Check the vacuum piping. 3. Install the STP pump in a
way that no foreign matter falls into the STP pump.
Contact Service office. Contact Service office. Contact Service office. 1. Contact Service office. 2. Contact Service office. 1. Contact Service office. 2. Contact Service office.
Probable causes
Abnormal magnetic bearing: 1. Change of the cable
length.
2. Disconnection of the STP
connection cable or control circuit error.
Excessive vibration applied externally to the STP pump: 1. External vibration/impact. 2. Atmospheric air flows into
the STP pump.
3. Foreign matter falls into
the STP pump.
Failure of the SCU-1600. Failure of the SCU-1600. Failure of the SCU-1600. 1. Wear-out of the cooling
water bearing.
2. Failure of the cooling fan
drive circuit.
1. Short of the STP
connection cable.
2. STP pump failure.
Pump operation
Contact noise and vibration of the rotor are generated from the STP pump. Decelerate and stop. Decelerate and stop. Free run.
*1
Decelerate and stop. Decelerate and stop. Free run.
*1
Occurrence condition
Excessive imbalance. Failure of serial communication. Abnormal CPU operation. Abnormal driver operation. Cooling fan come to a stop. Driver over current.
LCD Messages
Disturbance X_B Disturbance X_H Disturbance Y_B Disturbance Y_H Disturbance Z Driver Com Failure Driver CPU Error Driver Failure Driver FAN Failure Driver Overcurrent
*1
The driver output stops and the rotor continues rotating by inertia. It may take several hours to stop. To stop the STP pump quickly, close the vacuum valve at the outlet port
flange and introduce gas from the purge port into the STP pump.
Table 39 - Error messages after self test (continued)