SCU-1600 Control Unit for Turbomolecular Pump
March 10 119 Issue 1-a
7
MAINTENANCE
Referred
section
Instruction
Manual(B)
3.11
Countermeasures
1. Use the maximum
working pressure or less.
2. Use the allowable backing
pressure or less.
3. Check the vacuum piping
system for leakage.
4. Check the backing-pump
for its capacity and
START state.
(use a backing-pump with
the recommended
capacit
or more
Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
1. Connect the cable
correctly. If the cable is
not locked, lock it
securely.
2. Set "Leak Valve Option"
to "DISABLE".
Probable causes
1. High pressure at the inlet
port.
2. High pressure at the outlet
port.
3. Leakage of the piping
system.
4. Failure of the
backing-pump.
Failure of the SCU-1600.
Failure of the SCU-1600.
Failure of the SCU-1600.
Failure of the SCU-1600.
1. Disconnection of the
emergency vent valve
cable.
2. Incorrect setting of the
emer
enc
vent valve.
Pump operation
Decelerate and stop.
Free run.
*1
Free run.
*1
Touch down. The
magnetic bearing
output stops and the
rotor is descended
on the touch down
bearin
.
Decelerate and stop.
Decelerate and stop.
Occurrence condition
ACCELERATION state
continues for
approximately 30 minutes.
Driver overvoltage.
Failure of the driver circuit.
Abnormal CPU operation.
Serial communication
failure.
Disconnection of the
emergency valve cable.
LCD Messages
Driver Overload
Driver Overvoltage
Driver PWM Trouble
DSP Initialize Fail
DSP->PCB Com
Fail
E.valve disconnect
*1
The driver output stops and the rotor continues rotating by inertia. It may take several hours to stop. To stop the STP pump quickly, close the vacuum valve at the outlet port
flange and introduce gas from the purge port into the STP pump.
Table 40 - Error messages after self test (continued)
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